# US 2018/0003661 A1 · Micro multi-array sensor

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2018/0003661 A1
- Document ID: US20180003661A1
- Status: Published application
- Kind: A1
- Application number: 15/634,645
- Filed: 2017-06-27
- Published: 2018-01-04
- Earliest claimed: 2016-07-01
- Assignees: Point Engineering Co., Ltd.
- Applicants: Point Engineering Co., Ltd.
- Inventors: Bum Mo Ahn; Seung Ho Park; Sung Hyun Byun
- Web page: https://patentgrep.com/patent/US20180003661A1

## CPC

- G01N 27/128: {Microapparatus}
- G01N 27/14: of an electrically-heated body in dependence upon change of temperature
- G01N 33/0016: {by regulating a physical variable, e.g. pressure or temperature}
- G01N 33/0031: {comprising two or more sensors, e.g. a sensor array}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A micro multi-array sensor includes a substrate, a sensor electrode formed on the substrate, and a heater electrode formed on the substrate. The sensor electrode includes a first sensor electrode formed on the substrate and a second sensor electrode formed on an opposite surface of the substrate from the first sensor electrode. The heater electrode is disposed more adjacent to the first sensor electrode than the second sensor electrode.

## Claims

### Claim 1

A micro multi-array sensor, comprising:
a substrate;
a sensor electrode formed on the substrate; and
a heater electrode formed on the substrate,
wherein the sensor electrode includes a first sensor electrode formed on the substrate and a second sensor electrode formed on an opposite surface of the substrate from the first sensor electrode, and
the heater electrode is disposed more adjacent to the first sensor electrode than the second sensor electrode.

### Claim 2 (depends on 1)

The micro multi-array sensor of claim 1, wherein the second sensor electrode is disposed under the first sensor electrode.

### Claim 3 (depends on 1)

The micro multi-array sensor of claim 1, wherein the substrate includes a first support portion and air gaps formed around the first support portion,
the heater electrode includes a heat generation pattern formed on the first support portion and a heater electrode pad connected to the heat generation pattern,
the first sensor electrode includes a first sensor wiring formed on the first support portion and a first sensor electrode pad connected to the first sensor wiring, and
the second sensor electrode includes a second sensor wiring formed on an opposite surface of the first support portion from the first sensor wiring and a second sensor electrode pad connected to the second sensor wiring.

### Claim 4 (depends on 1)

The micro multi-array sensor of claim 1, wherein the substrate is an anodic oxide film obtained by anodizing a base material made of a metallic material and then removing the base material.

### Claim 5 (depends on 3)

The micro multi-array sensor of claim 3, wherein the air gaps are spaces formed so as to extend from an upper surface of the substrate to a lower surface of the substrate.

### Claim 6 (depends on 3)

The micro multi-array sensor of claim 3, wherein the substrate further includes a second support portion and bridge portions configured to connect the first support portion and the second support portion, and
the heater electrode pad, the first sensor electrode pad and the second sensor electrode pad are formed in the second support portion and the bridge portions.

### Claim 7 (depends on 3)

The micro multi-array sensor of claim 3, wherein a dummy metal is formed on the first support portion in a space between ends of the heat generation pattern.

### Claim 8 (depends on 3)

The micro multi-array sensor of claim 3, wherein the first support portion is made of a porous material.