Devices and systems for spatial aggregation of spectral analysis from electron microscopes
AssigneeEDAX, Incorporated
InventorsDivyesh I. Patel, Tara Lyn Nylese, Jens Rafaelsen, Stuart Ian Wright
Life of this patent
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Abstract
An x-ray spectrum collected from a sample via excitation of the sample by an electron beam includes artifacts due to interaction volume, surface effects, contamination, or other interferences with the desired collection of representative x-rays from the sample. Inline spectral correlation, summation, averaging, other aggregation, or combinations thereof provides more precise collection of x-ray spectrum from multi-phase, unprepared, particle, or complex samples.
Claims20
A method for spatially aggregating spectra comprising:
- acquiring a central spectrum and a plurality of adjacent spectra from an x-ray spectrometer;
- and
- aggregating the central spectrum with one or more of the plurality of adjacent spectra to produce an aggregated spectrum.
A method for spatially aggregating spectra comprising:
- acquiring a central spectrum;
- acquiring a plurality of adjacent spectra;
- comparing the central spectrum to one or more of the plurality of adjacent spectra;
- aggregating the central spectrum with one or more of the plurality of adjacent spectra to produce an aggregated spectrum;
- and
- identifying at least one energy peak in the aggregated spectrum to produce an aggregated element list.
A method for spatially aggregating spectra comprising:
- acquiring a spectral map having spectra therein;
- identifying energy peaks of a plurality of the spectra to calculate one or more measured element lists;
- correlating a plurality of measured element lists to identify one or more phases;
- aggregating a central spectrum associated with a central sampling location with one or more adjacent spectra associated with one or more adjacent sampling locations based upon the one or more phases to produce an aggregated spectrum;
- and
- identifying energy peaks in the aggregated spectrum to produce an aggregated element list.
Dependencies are inferred from the claim text.