US 2018/0003626 A1Published application

Gas concentration measurement apparatus

AssigneeHoriba, Ltd.

InventorsKimihiko ARIMOTO, Issei YOKOYAMA, Tomoko SEKO, Yutaro TSUCHISAKA, Daisuke KITAKI, Yasuo FURUKAWA

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Abstract

In order to provide a gas concentration measurement apparatus that suppresses any change in the temperature of an optical fiber, and also makes it difficult for any effects to appear in the measurement accuracy due to air from the surrounding environment penetrating the optical path of the measurement light while using only a simple structure and without causing any excessive energy consumption there are provided a first sealing component provided between an incident surface of a gas cell and a first end surface that is formed at a periphery of an emission aperture of a light-emitting unit so as to enclose the periphery of the emission aperture, and a second sealing component provided between an emission surface of the gas cell and a second end surface that is formed at a periphery of an incident aperture of a light-receiving unit so as to enclose the periphery of the incident aperture.

Claims16

Dependent claims

A gas concentration measurement apparatus comprising:

a gas cell equipped with an incident surface through which measurement light is irradiated into an interior of the gas cell, and an emission surface through which the measurement light is emitted to the outside of the gas cell, and that is formed such that a sample gas is introduced into the interior of the gas cell;
a heater mechanism that heats the gas cell;
a light-emitting unit that causes measurement light that has been emitted from an end surface of a first optical fiber provided inside the light-emitting unit to be emitted into the gas cell via an emission aperture;
a light-receiving unit that causes measurement light that has passed through the gas cell and is to be irradiated into an incident aperture to be irradiated onto an end surface of a second optical fiber provided inside the light-receiving unit;
a first sealing component that is provided between the incident surface of the gas cell and a first end surface that is formed at a periphery of the emission aperture of the light-emitting unit so as to enclose the periphery of the emission aperture;
and
a second sealing component that is provided between the emission surface of the gas cell and a second end surface that is formed at a periphery of the incident aperture of the light-receiving unit so as to enclose the periphery of the incident aperture.

4 more elements

A gas concentration measurement apparatus comprising:

a gas cell equipped with a cell main body into whose interior sample gas is introduced, an incident portion through which measurement light is irradiated into an interior of the cell main body, and an emission portion through which the measurement light that has passed through the cell main body is emitted to the outside;
a heater mechanism that heats the gas cell, or the sample gas introduced into the gas cell;
a first optical fiber that is provided so as to emit measurement light from an end surface thereof, and cause this measurement light to be irradiated into the incident portion;
and
a second optical fiber that is provided such that the measurement light that has passed through the emission portion is irradiated onto an end surface of the second optical fiber, wherein
the incident portion and the emission portion have a double-glazed window structure whose interior is either maintained in a vacuum, or holds a gas.

3 more elements

Dependencies are inferred from the claim text.