Electromagnetic wave detector and gas analysis device

An electromagnetic wave detector comprising:

• a substrate;
• a first electromagnetic wave sensor configured to include a light reception unit which is held in midair above the substrate by a support leg;
• and
• a second electromagnetic wave sensor configured to include a light reception unit which is held in midair above the substrate by a support leg that has a structure identical to a structure of the support leg of the first electromagnetic wave detector, the second electromagnetic wave sensor being provided to be adjacent to the first electromagnetic wave sensor, wherein
• the light reception unit of the first electromagnetic wave sensor is formed on the same plane as the support leg and includes a flat reflective film which covers an entire surface of the light reception unit,
• the light reception unit of the second electromagnetic wave sensor is formed on the same plane as the support leg and includes an electromagnetic wave absorption body which detects one of light in a predetermined wavelength band and light of a predetermined polarization,
• the first electromagnetic wave sensor includes the light reception unit comprising the reflective film and the support leg which the electromagnetic wave enters directly, and has the same output as the sensor output caused by the electromagnetic wave absorbed in the area other than the light reception unit of the second electromagnetic wave sensor and
• a difference between output of the second electromagnetic wave sensor and output of the first electromagnetic wave sensor is output.

An electromagnetic wave detector comprising:

• a substrate;
• a fifth electromagnetic wave sensor configured to include a support leg which is held in midair above the substrate;
• and
• a second electromagnetic wave sensor configured to include a light reception unit which is held in midair above the substrate by a support leg that has a structure identical to a structure of the support leg of the fifth electromagnetic wave sensor, the second electromagnetic wave sensor being provided to be adjacent to the fifth electromagnetic wave sensor, wherein
• the fifth electromagnetic wave sensor is constituted of only the support leg which is held in midair and the electromagnetic wave enters directly, and the support leg includes a reflective film which is formed on the same plane as the support leg and is provided only on a hot junction region where a hot junction of thermocouple is thermally connected,
• the light reception unit of the second electromagnetic wave sensor includes an electromagnetic wave absorption body which detects one of light in a predetermined wavelength band and light of a predetermined polarization, and
• a difference between output of the second electromagnetic wave sensor and output of the fifth electromagnetic wave sensor is output.