Thermal sensing acoustic wave resonator and acoustic wave filter having thermal sensing acoustic wave resonator
AssigneeWin Semiconductors Corp.
InventorsRe Ching Lin, Shu Hsiao Tsai, Cheng Kuo Lin, Fan Hsiu Huang, Chih-Feng Chiang, Tung-Yao Chou
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Abstract
An acoustic wave filter having thermal sensing acoustic wave resonator comprises a substrate, a plurality of series acoustic wave resonators formed on the substrate, at least one shunt acoustic wave resonator formed on the substrate and a thermal sensing acoustic wave resonator. The thermal sensing acoustic wave resonator is one of a series acoustic wave resonator and a shunt acoustic wave resonator. Thereby the thermal sensing acoustic wave resonator plays dual roles of thermal sensing and acoustic wave filtering.
Claims27
A thermal sensing acoustic wave resonator for sensing a thermal variation, wherein said thermal sensing acoustic wave resonator is formed on a substrate, wherein said thermal variation is correlated to at least one of a capacitance variation and a resonance frequency variation of said thermal sensing acoustic wave resonator.
An acoustic wave filter having a thermal sensing acoustic wave resonator comprising:
- a first substrate;
- a plurality of first acoustic wave resonators formed on said first substrate, wherein each of said plurality of first acoustic wave resonators is a series acoustic wave resonator of said acoustic wave filter;
- at least one second acoustic wave resonator formed on said first substrate, wherein each of said at least one second acoustic wave resonator is a shunt acoustic wave resonator of said acoustic wave filter;
- and
- a thermal sensing acoustic wave resonator for sensing a thermal variation.
An acoustic wave device having a thermal sensor comprising:
- a first substrate;
- a second substrate, wherein said first substrate and said second substrate are stacked with each other;
- an acoustic wave device;
- and
- a thermal sensor, wherein said thermal sensor is formed on one of said first substrate and said second substrate, while said acoustic wave device is formed on the other.
Dependencies are inferred from the claim text.