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US 2018/0003503 A1Published application
Damping of a Sensor
OwnerMarco Hauboldinventor
Life of this patent
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Abstract
A device comprises a substrate, a spring structure, and a first sensor. The first sensor is resiliently coupled with the substrate via the spring structure. The spring structure is configured to provide damping of the first sensor with respect to the substrate. The device also comprises a second sensor configured to sense a deflection of the spring structure.
Claims22
A device comprising:
- a substrate;
- a spring structure;
- a first sensor resiliently coupled with the substrate via the spring structure, the spring structure being configured to provide damping of the first sensor with respect to the substrate;
- and
- a second sensor configured to sense a deflection of the spring structure.
2 more elements
A device comprising:
- a substrate;
- a spring structure;
- a first sensor resiliently coupled with the substrate via the spring structure, the spring structure being configured to provide damping of the first sensor with respect to the substrate;
- and
- a second sensor configured to sense a deflection of the spring structure, wherein the spring structure is configured to provide two degrees of freedom of motion to the first sensor.
2 more elements
A method comprising:
- sensing a physical observable at a first sensor;
- providing damping to the first sensor using a spring structure;
- and
- sensing a deflection of the spring structure at a second sensor.
1 more element
Dependencies are inferred from the claim text.