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US 2018/0002830 A1Published application
Device To Increase Deposition Uniformity In Spatial ALD Processing Chamber
AssigneeApplied Materials, Inc.
InventorsJoseph Yudovsky, Alexander S. Polyak
Life of this patent
Estimating the term…
Abstract
Susceptor assemblies comprising a susceptor with a top surface with a plurality of recesses and a bottom surface are described. A heater is positioned below the susceptor to heat the susceptor. A shield is positioned between the bottom surface of the susceptor and the heater. The shield increases deposition uniformity across the susceptor.
Claims20
A susceptor assembly comprising:
- a susceptor with a top surface and a bottom surface, the top surface having a plurality of recesses formed therein, the recesses sized to support a substrate during processing;
- a heater positioned below the susceptor to heat the susceptor;
- and
- a shield positioned between the bottom surface of the susceptor and the heater, the shield increasing deposition uniformity across the susceptor.
1 more element
A susceptor assembly comprising:
- a susceptor with a top surface and a bottom surface, the top surface having a plurality of recesses formed therein, the recesses sized to support a substrate during processing;
- a heater positioned below the susceptor to heat the susceptor;
- a shield positioned between the bottom surface of the susceptor and the heater, the shield comprising a plurality of shield segments, each shield segment positioned in a region between the recesses and increasing deposition uniformity across the susceptor, each shield segment is contoured to have a shape similar to a shape of the recesses and cover more of a leading edge of a recess than a trailing edge of an adjacent recess, each shield segment including a plurality of openings therethrough;
- and
- a plurality of suspension rods connected to the susceptor and passing through the plurality of openings in the shield segments to support the shield segments and maintain a gap between the shield segments and the susceptor.
2 more elements
A susceptor assembly comprising:
- a susceptor with a top surface and a bottom surface, the top surface having a plurality of recesses formed therein, the recesses sized to support a substrate during processing;
- a heater positioned below the susceptor to heat the susceptor;
- and
- a shield positioned between the bottom surface of the susceptor and the heater, the shield increasing deposition uniformity across the susceptor, the shield having a ring shape with an inner edge and an outer edge, the inner edge closer to a center of the susceptor than the outer edge, the shield including a plurality of protrusions extending inwardly from the inner edge, each protrusion having an opening therethrough, the distance from the inner edge of the shield to the outer edge of the shield covers at least about ⅔ of a width of the recess;
- and
- a plurality of suspension rods connected to the susceptor, the suspension rods supporting the shield and maintaining a gap between the shield and the susceptor, each of the suspension rods passing through an opening in the shield.
3 more elements
Dependencies are inferred from the claim text.