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AssigneeOerlikon Surface Solutions AG, PfäFfikon
InventorsJuergen Ramm, Beno Widrig, Richard Rachbauer
Estimating the term…
A macroparticle filter device for cathodic arc evaporation, to be placed between at least one arc evaporation source and at least one substrate exhibiting at least a surface to be coated with material evaporated from a cathode of the arc evaporation source in a vacuum coating chamber. The macroparticle filter device includes one or more filter components that can prevent macroparticles emitted by the cathode during cathodic arc evaporation to arrive the substrate surface to be coated. The at least one component is provided as one or more flexible sheets that block the lineal way of the macroparticles from the cathode to the substrate surface to be coated. Further a method for utilizing the macroparticle filter device is presented.
Filter device for filtering macroparticles produced by cathodic arc evaporation in a vacuum coating chamber, wherein the filter device comprises at least one macroparticle filter component that can prevent macroparticles emitted during evaporation of a cathode comprised in an arc evaporation source to arrive a substrate surface placed in front of the cathode surface within the vacuum coating chamber, when the macroparticle filter component is placed between the cathode and the substrate surface, wherein the macroparticle filter component is provided as a frame construction with one or more flexible sheets, characterized in that one or more of the flexible sheets are provided as a filter net assembly comprising one or more flexible net layers.
Dependencies are inferred from the claim text.