Plasma generation method and sterile water production method
AssigneeNGK Insulators, Ltd.
InventorsTakashi YOKOYAMA, Shoji TANGE, Hideki SHIMIZU, Kazunari YAMADA
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Abstract
A pulsed voltage is repeatedly applied between a first electrode and a second electrode to which a gas is supplied, a plasma is generated between the first electrode and the second electrode, and an active species is produced in the plasma. The energy necessary for plasma generation is set to a value greater than or equal to 1.8 W/cm3 and less than or equal to 8.5 W/cm3.
Claims9
A plasma generation method for producing an active species in a plasma, by applying a voltage between a first electrode and a second electrode to which a gas is supplied, and generating the plasma between the first electrode and the second electrode, comprising the steps of:
- repeatedly applying a pulsed voltage between the first electrode and the second electrode;
- and
- setting an input energy necessary for generating the plasma to a value greater than or equal to 1.8 W/cm3 and less than or equal to 8.5 W/cm3.
A sterile water production method for producing sterile water by supplying a plasma to water, wherein the plasma is generated using a plasma generation method for producing an active species in the plasma, by applying a voltage between a first electrode and a second electrode to which a gas is supplied, and generating the plasma between the first electrode and the second electrode, comprising the steps of:
- repeatedly applying a pulsed voltage between the first electrode and the second electrode;
- and
- setting an input energy necessary for generating the plasma to a value greater than or equal to 1.8 W/cm3 and less than or equal to 8.5 W/cm3.
Dependencies are inferred from the claim text.