Ozone generating device

An ozone generating device comprising a discharge unit configured to discharge a material gas which flows through a discharge space which is formed between two electrodes to generate ozone and a cooling unit configured to radiate heat which is generated by discharging,

• wherein at least a portion of the material gas is obtained by vaporizing a liquefied raw material,
• the cooling unit comprises a first cooling unit through which a first refrigerant flows in contact with at least one of the two electrodes and a second cooling unit which is provided further to the downstream side of flow of the material gas in the discharge unit than the first cooling unit, through which a second refrigerant flows in contact with at least one of the two electrodes, and in which the cold heat source is the liquefied raw material, and the temperature of the second refrigerant which is introduced to the second cooling unit is set to be lower than the temperature of the first refrigerant which is introduced to the first cooling unit.