Method for homogenizing the height of a plurality of wires and device using such wires
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsJoël EYMERY, Amine EL KACIMI
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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsJoël EYMERY, Amine EL KACIMI
Estimating the term…
A method for homogenizing the height of a plurality of wires from the plurality of wires erected on a face of a substrate, the method including a first step of coating the face of the substrate including the plurality of wires with a first film, the first film embedding the plurality of wires over a first height; a second step of coating the first film with a second film, the second film embedding at least one part of the plurality of wires over a second height; a step of removing the second film, the part of the wires of the plurality of wires embedded in the second film being removed at the same time as the second film, a mechanical stress between the first film and the second film being exerted during the removal step.
A method for homogenizing a height of a plurality of wires from the plurality of wires erected on a face of a substrate, the method comprising:
Dependencies are inferred from the claim text.