Micromechanical structure and method for manufacturing the same
AssigneeInfineon Technologies AG
InventorsTobias Frischmuth, Guenter Denifl, Thomas Grille, Ursula Hedenig, Markus Kahn, Daniel Maurer, Ulrich Schmid, Michael Schneider
Life of this patent
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Abstract
A micromechanical structure in accordance with various embodiments may include: a substrate; and a functional structure arranged at the substrate; wherein the functional structure includes a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region; and wherein at least a section of the functional region has an elastic modulus in the range from about 5 GPa to about 70 GPa.
Claims21
A micromechanical structure, comprising:
- a substrate;
- and
- a functional structure arranged at the substrate;
- wherein the functional structure comprises a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region;
- and
- wherein at least a section of the functional region has an elastic modulus in the range from about 5 GPa to about 70 GPa.
A sound transducer comprising a micromechanical structure, the micromechanical structure comprising;
- a substrate;
- and
- a functional structure arranged at the substrate;
- wherein the functional structure comprises a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region;
- and
- wherein at least a section of the functional region has an elastic modulus in the range from about 5 GPa to about 70 GPa;
- wherein the sound transducer is configured to transduce sound.
A sensor comprising a micromechanical structure, the micromechanical structure comprising;
- a substrate;
- and
- a functional structure arranged at the substrate;
- wherein the functional structure comprises a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region;
- and
- wherein at least a section of the functional region has an elastic modulus in the range from about 5 GPa to about 70 GPa;
- wherein the sensor is configured to provide an electrical signal in response to the actuation of the functional region.
Dependencies are inferred from the claim text.