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US 2018/0002162 A1Published application
Mems sensor with high voltage switch
AssigneeInvenSense, Inc.
InventorsMatthew Thompson, Joseph Seeger
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Abstract
A system and/or method for utilizing MEMS switching technology to operate MEMS sensors. As a non-limiting example, a MEMS switch may be utilized to control DC and/or AC bias applied to MEMS sensor structures. Also for example, one or more MEMS switches may be utilized to provide drive signals to MEMS sensors (e.g., to provide a drive signal to a MEMS gyroscope).
Claims12
A MEMS device comprising:
- a MEMS switch operable to switch a signal, wherein the MEMS switch comprises:
- a post anchor;
- a flexible MEMS arm coupled to the post anchor;
- an actuator electrode;
- and
- a contact electrode.
3 more elements
Dependencies are inferred from the claim text.