Mems device and process
AssigneeCirrus Logic International Semiconductor Ltd.
InventorsColin Robert JENKINS, Scott Lyall CARGILL, Clive Robert GRAHAM
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Abstract
The present application describes MEMS transducer having a membrane and a membrane electrode. The membrane and membrane electrode form a two-layer structure. The membrane electrode is in the form of a lattice of conductive material. The pitch of the lattice and/or the size of the openings varies from a central region of the membrane electrode to a region laterally outside the central region.
Claims24
A MEMS transducer comprising a membrane layer and a membrane electrode formed of a conductive material on a surface of the membrane layer, the membrane electrode having a plurality of openings provided therein, wherein a ratio of an area of the conductive material relative to an area of the openings decreases from a first said ratio in a first region at or near a central region of the membrane layer to a second said ratio in a second region laterally outside the first region.
A membrane electrode for MEMS transducer, the membrane electrode comprising a lattice of conductive material, wherein the lattice comprises a plurality of openings each opening having a diametric size and a pitch which represents the distance between the centre of adjacent openings, and wherein the pitch of the lattice and/or the size of the openings varies from a central region of the membrane electrode to a region laterally outside the central region.
A method of fabricating a MEMS transducer comprising;
- forming a membrane layer;
- forming a layer of conductive material on the surface of the membrane layer to form a membrane electrode;
- and
- patterning the membrane electrode to provide a plurality of openings therein, wherein a ratio of an area of the conductive material relative to an area of the openings decreases from a first said ratio in a first region at or near a central region of the membrane layer to a second said ratio in a second region laterally outside the first region.
Dependencies are inferred from the claim text.