Mems device and process
AssigneeCirrus Logic International Semiconductor Ltd.
InventorsMarek Sebastian PIECHOCINSKI, Colin Robert JENKINS, Clive Robert GRAHAM
Life of this patent
Estimating the term…
Abstract
The application describes MEMS transducer structures comprising a membrane structure having a flexible membrane layer and at least one electrode layer. The electrode layer is spaced from the flexible membrane layer such that at least one air volume extends between the material of the electrode layer and the membrane layer. The electrode layer is supported relative to the flexible membrane by means of a support structure which extends between the first electrode layer and the flexible membrane layer.
Claims26
A MEMS transducer comprising a membrane structure, the membrane structure comprising a flexible membrane layer and a first electrode layer, the first electrode layer being supported relative to the flexible membrane layer so as to be spaced from the flexible membrane layer.
A MEMS transducer comprising a membrane structure, the membrane structure comprising a membrane and an electrode, wherein the material forming the electrode is separated from the membrane by at least one air volume.
Dependencies are inferred from the claim text.