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US 2018/0002159 A1Published application
Mems devices and processes
AssigneeCirrus Logic International Semiconductor Ltd.
InventorsScott Lyall CARGILL, Colin Robert JENKINS, Euan James BOYD, Richard Ian LAMING
Life of this patent
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Abstract
The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.
Claims24
A MEMS transducer comprising a membrane supported relative to a substrate, the membrane comprising a central region and plurality of stress distributing arms which extend laterally from the central region.
A MEMS transducer comprising:
- a membrane layer comprising:
- an active membrane region, the active region comprising a plurality of arms for supporting the active membrane region;
- and
- a plurality of inactive membrane regions which are not directly connected to the active membrane region.
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Dependencies are inferred from the claim text.