Piezoelectric package-integrated synthetic jet devices

An organic package substrate comprising:

• a plurality of organic dielectric layers and a plurality of conductive layers to form the organic package substrate;
• first and second cavities formed in the organic package substrate;
• and
• a piezoelectric micro-pump device integrated with the organic package substrate, the piezoelectric micro-pump device including a first electrode, a piezoelectric material in contact with the first electrode, and a second electrode in contact with the piezoelectric material, wherein the piezoelectric micro-pump device is suspended with respect to the first and second cavities of the organic package substrate and the piezoelectric micro-pump device generates a fluid flow caused by an application of an electrical signal between the first and second electrodes.

A computing device comprising:

• at least one processor to process data;
• and
• an organic package substrate coupled to the at least one processor, the organic package substrate including:
• a plurality of organic dielectric layers and a plurality of conductive layers to form the organic package substrate,
• a piezoelectric jet device having a vibrating membrane positioned between first and second cavities of the organic package substrate,
• a piezoelectric material coupled to the vibrating membrane, wherein the vibrating membrane acts as a first electrode, and
• a second electrode in contact with the piezoelectric material, and
• wherein the vibrating membrane generates a fluid flow through an orifice in response to application of an electrical signal between the first and second electrodes.