Methods and systems providing misalignment correction in robots

A dual-bladed robot calibration system, comprising:

• a dual-bladed robot including first moveable arms and a first end effector attached to one of the first moveable arms, and second moveable arms and a second end effector attached to one of the second moveable arms, wherein the first end effector and second end effector are independently moveable;
• first flags disposed on one of the first moveable arms or the first end effector;
• second flags disposed on one of the second moveable arms or the second end effector;
• first beam sensors provided proximate to a first process location;
• second beam sensors provided proximate to a second process location;
• and
• a controller coupled to the dual-bladed robot and operatively configured to:
• move the dual-bladed robot to a first robot configuration with the first end effector extended and the second end effector retracted and record measured positions where the first beam sensors are blocked and unblocked by the first flags,
• move the dual-bladed robot to a second robot configuration with both of the first end effector and the second end effector extended and record measured positions where the first beam sensors are blocked and unblocked by the first flags and where the second beam sensors are blocked and unblocked by the second flags, and
• determine a position correction for at least one of the first robot configuration and the second robot configuration.

An electronic device processing system, comprising:

• a robot including moveable arms and an end effector attached to one of the moveable arms, and a flag disposed on one of the moveable arms or the end effector, wherein the end effector is moveable in translation;
• a chamber adapted to be serviced by the end effector;
• a beam sensor positioned at a distance from the chamber;
• and
• a controller coupled to the robot and operatively configured to:
• cause movement of the robot to a robot configuration with the end effector extended and record blocked and unblocked transition locations where the beam sensor is blocked and unblocked by the flag, and
• determine a position correction relative to a calibrated position for the robot configuration.

A method of correcting misalignment in a robot, comprising;

• providing a robot including moveable arms and an end effector attached to one of the moveable arms, and a flag disposed on one of the moveable arms or the end effector;
• providing a chamber adapted to be serviced by the end effector;
• providing a beam sensor positioned at a distance from the chamber;
• moving the robot to a robot configuration with the end effector extended;
• recording blocked and unblocked transition locations where the beam sensor is blocked and unblocked by the flag;
• and
• determining a position correction relative to a calibrated position for the robot configuration.