Head height adjustment device and substrate processing apparatus provided with head height adjustment device

A substrate processing apparatus comprising:

• a table provided with a substrate holding surface for holding a substrate;
• a pad for processing the substrate held on the table;
• a head for holding the pad;
• an actuator for moving the head in a direction perpendicular to the substrate holding surface of the table;
• and
• a mechanical stopper device for stopping a movement of the head in the direction perpendicular to the substrate holding surface,
• wherein the mechanical stopper device comprises:
• a first member that can move in a first direction which is a direction parallel to the substrate holding surface and has a first inclined surface that forms a predetermined angle with respect to the first direction;
• and
• a second member that has a second inclined surface that slidably contacts the first inclined surface of the first member, and
• the second member is provided with a stopping surface for defining a stop position of the head when the actuator or a lifting member for lifting/lowering the actuator, the lifting member being connected to the actuator, comes into contact the stopping surface, and
• the stopping surface of the second member is displaceable in a second direction perpendicular to the substrate holding surface when the first member moves in the first direction.