Film thickness signal processing apparatus, polishing apparatus, film thickness signal processing method, and polishing method
AssigneeEbara Corporation
InventorAkira NAKAMURA
Life of this patent
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Abstract
A receiving unit receives sensor data output from an eddy current sensor for detecting the film thickness of a polishing object to generate film thickness data. A correcting unit corrects the film thickness data in an inside of the edge of the polishing object based on the film thickness data generated by the receiving unit. The correcting unit corrects the film thickness data generated by the receiving unit in the inside of the edge of the polishing object using the film thickness data generated by the receiving unit in an outside of the edge of the polishing object.
Claims6
A film thickness signal processing apparatus comprising:
- a receiving unit for receiving sensor data output from a film thickness sensor for detecting a film thickness of a polishing object to generate film thickness data;
- and
- a correcting unit for correcting the film thickness data in an inside of an edge of the polishing object based on the film thickness data generated by the receiving unit,
- wherein the correcting unit corrects the film thickness data generated by the receiving unit in the inside of the edge of the polishing object using the film thickness data generated by the receiving unit in an outside of the edge of the polishing object.
A film thickness signal processing method comprising:
- receiving sensor data output from a film thickness sensor for detecting a film thickness of a polishing object to generate film thickness data;
- and
- correcting the film thickness data inside an edge of the polishing object based on the generated film thickness data,
- wherein the correcting is performed by correcting the generated film thickness data in an inside of the edge of the polishing object using the generated film thickness data in an outside of the edge of the polishing object.
A polishing method comprising:
- receiving sensor data output from a film thickness sensor for detecting a film thickness of a polishing object to generate film thickness data;
- correcting the film thickness data in an inside of the edge of the polishing object based on the generated film thickness data;
- and
- controlling a pressing force of the polishing object based on the corrected film thickness data,
- wherein the correcting is performed by correcting the generated film thickness data in the inside of the edge of the polishing object using the generated film thickness data in an outside of the edge of the polishing object.
Dependencies are inferred from the claim text.