Structure Body and Pattern Formation Method
AssigneeKabushiki Kaisha Toshiba
InventorsTomoaki SAWABE, Akira WATANABE, Naoko KlHARA, Ryosuke YAMAMOTO
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Abstract
According to one embodiment, a structure body includes a plurality of particles and a base body. The particles are separated from each other. The each of the particles includes a first polymer provided at an outer surface of the each of the particles. The base body includes a surface having a protrusion and a recess. The base body includes a second polymer provided at the surface. The second polymer is different from the first polymer. The particles are supported by the protrusion, and the particles are separated from the recess.
Claims20
A structure body, comprising:
- a plurality of particles separated from each other, each of the particles including a first polymer provided at an outer surface of the each of the particles;
- and
- a base body including a surface having a protrusion and a recess, the base body including a second polymer provided at the surface, the second polymer being different from the first polymer,
- the particles being supported by the protrusion, and the particles being separated from the recess.
A pattern formation method, comprising:
- a solution film formation process of forming a solution film on a surface of a base body, the solution film including a liquid and a plurality of particles, the surface having a protrusion and a recess, each of the particles including a first polymer provided at an outer surface of the particle, the base body including a second polymer provided at the surface, the second polymer being different from the first polymer;
- and
- a liquid removal process of removing the liquid,
- after the removing of the liquid, the particles being supported by the protrusion, and the particles being separated from the recess.
The method according to claim 14, wherein the solution film formation process includes coating, on the surface, a solution including the liquid and the particles.
The method according to claim 14, further comprising a polymer removal process of removing the first polymer and the second polymer after the liquid removal process.
Dependencies are inferred from the claim text.