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US 2018/0001290 A1Published application
Method for the wet deposition of thin films
AssigneesPrayon, Universite De Liege
InventorsCarlos PAEZ, Dimitri LIQUET, Cédric CALBERG, Benoît HEINRICHS, Christelle ALIÉ
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Abstract
Methods for the deposition of thin films comprising at least preparing a solution containing at least one transition metal oxide powder in a solvent, continuously stirring said solution in order to form a sol, and using said sol in the form of said transition metal oxide film, wherein the powder is subjected to a preliminary preparation step.
Claims20
A process for manufacturing a film of oxide of transition metals, the process comprising:
- (a) providing a powder of formula AaMbOc, in which:
- A is an alkali metal;
- M is a metal or a mixture of metals chosen from transition metals, lanthanides or actinides;
- O is oxygen;
- and
- a, b and c are real numbers greater than 0 and are chosen so as to provide electrical neutrality;
- (b) preparing a colloidal sol from the said powder processed in (a),
- (c) processing the said colloidal sol in the form of the said film of oxide of transition metals on a substrate degreased beforehand using a solution containing a first alcoholic or alkaline solvent S1, the said processing comprising:
- (c′) depositing one or more layers of the said colloidal sol on the said substrate, and
- (c″) annealing said one or more layers formed in stage (c′) in order to prepare the said film of oxide of transition metals,
- wherein the said colloidal sol is prepared by:
- (b′) providing the said powder AaMbOc having a desired particle size distribution;
- (b″) calcining the said AaMbOc powder from (b′), and
- (b′″) mixing the said powder obtained after the calcining of (b″)
- with a second solvent S2 to form the said colloidal sol, and the said colloidal sol thus formed consists of one or more calcined oxides of metals and one or more solvents.
12 more elements
Dependencies are inferred from the claim text.