Silica membrane filter
AssigneeNGK Insulators, Ltd.
InventorsAya MIURA, Masahiro FURUKAWA
Life of this patent
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Abstract
A silica membrane filter 10 includes an ultrafiltration membrane 15, which is disposed on a support body 14 and which contains an element 14 as a primary component, and a silica membrane 18 which is disposed on the ultrafiltration membrane 15 and which has an aryl group. The ultrafiltration membrane 15 has a structure infiltrated by Si of the silica membrane 18, the atomic ratio A (=Si/M) of Si to the element M in a membrane-side region 16, which is a region corresponding to 25% of the ultrafiltration membrane 15 from the silica membrane 18, satisfies 0.01≦A≦0.5, and the ratio A/B of the atomic ratio A to the atomic ratio B (=Si/M) in a base-material-side region 17, which is a region corresponding to 25% from the support body 14, is within the range of 1.1 or more.
Claims9
A silica membrane filter comprising:
- an ultrafiltration membrane which is disposed on a support body and which contains an element M as a primary component;
- and
- a silica membrane which is disposed on the ultrafiltration membrane and which has an aryl group,
- wherein the ultrafiltration membrane has a structure infiltrated by Si of the silica membrane, the atomic ratio A (=Si/M) of Si to the element M in a membrane-side region, which is a region corresponding to 25% of the ultrafiltration membrane from the silica membrane, satisfies 0.01≦A≦0.5, and the ratio A/B of the atomic ratio A to the atomic ratio B (=Si/M) in a base-material-side region, which is a region corresponding to 25% of the ultrafiltration membrane from the support body, is within the range of 1.1 or more.
Dependencies are inferred from the claim text.