Method for reversible bonding between two elements
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsMessaoud BEDJAOUI, Sylvain Poulet
Life of this patent
Estimating the term…
Abstract
Method for reversible bonding between a first element and a second element, comprising the implementation of the following steps: a) producing at least one oxide layer on at least one first face of the first element or of the second element; b) joining the first face of the first element with the first face of the second element such that the oxide layer forms a bonding interface between the first element and the second element; c) disjoining the second element with regard to the first element by the application of a heat treatment under controlled humid atmosphere physically and/or chemically degrading the oxide layer.
Claims14
Method for reversible bonding between a first element and a second element, comprising at least:
- a) producing at least one oxide layer on at least one first face of the first element or at least one first face of the second element;
- b) joining the at least one first face of the first element with the at least one first face of the second element such that the oxide layer forms a bonding interface between the first element and the second element;
- c) disjoining the second element with regard to the first element by the application of a heat treatment under controlled humid atmosphere physically and/or chemically degrading the oxide layer.
Dependencies are inferred from the claim text.