Thin film transistor array panel and manufacturing method of the same
AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorHongyuan XU
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Abstract
A thin film transistor array panel and a manufacturing method are disclosed herein. The thin film transistor array panel includes a data line, a first block of a source electrode, a third block of a drain electrode, and an electrode layer which are formed by a first metal layer disposed on a baseplate; a second block of the source electrode, a fourth block of the drain electrode are formed by a second metal layer which is disposed on the first metal layer. The first block and the second block overlap to combine integrally. The third block and the fourth block overlap to combine integrally. The present invention can decrease the electrical resistance of each of the source electrode and the drain electrode.
Claims20
A thin film transistor array panel, comprising:
- a baseplate;
- a data line, being formed by a first metal layer, wherein the first metal layer is disposed on the baseplate;
- a thin film transistors, the thin film transistor comprising:
- a source electrode, comprising a first block and a second block, the first block and the second block overlapping to combine integrally, the first block being a portion of the first metal layer located in a first region, the second block being a portion of a second metal layer located in the first region, wherein the first region is a portion to which the source electrode corresponds, the second metal layer disposed on the first metal layer, the source electrode connects with the data line;
- a drain electrode, which comprising a third block and a fourth block, the third block and the fourth block overlapping to combine integrally, the third block being a portion of the first metal layer located in a second region, the fourth block being a portion of a second metal layer located in the second region, wherein the second region is a portion to which the drain electrode corresponds, the second metal layer disposed on the first metal layer;
- a semiconductor layer, being overlapping on the source electrode, the drain electrode, and a gap between the source electrode and the drain electrode;
- a gate electrode, being over the semiconductor;
- an insulation layer, being overlapping on the data line and the semiconductor layer;
- a scanning line, being disposed on the insulation layer, the scanning line connecting with the gate electrode;
- a protection layer, being disposed on the scanning line and the insulation layer;
- an electrode layer, being formed by the first metal layer, the electrode layer connecting with the drain electrode;
- wherein the gate electrode is disposed on the insulation layer;
- the data line, the first block of the source electrode, the third block of the drain electrode, and the electrode layer are all formed by applying a first tone-mask process and a first etching process to the first metal layer;
- the second block of the source electrode and the fourth block of the drain electrode are both formed by applying a second etching process to the second metal layer which has been processed by the first tone-mask process and the first etching process;
- the semiconductor layer is formed by disposing a semiconductor material on at least one portion of the source electrode, at least one portion of the drain electrode, and the gap, then applying a second tone-mask process to the semiconductor material.
A thin film transistor array panel, comprising:
- a baseplate;
- a data line, being formed by a first metal layer, wherein the first metal layer is disposed on the baseplate;
- a thin film transistors, the thin film transistor comprising:
- a source electrode, comprising a first block and a second block, the first block and the second block overlapping to combine integrally, the first block being a portion of the first metal layer located in a first region, the second block being a portion of a second metal layer located in the first region, wherein the first region is a portion to which the source electrode corresponds, the second metal layer disposed on the first metal layer, the source electrode connects with the data line;
- a drain electrode, which comprising a third block and a fourth block, the third block and the fourth block overlapping to combine integrally, the third block being a portion of the first metal layer located in a second region, the fourth block being a portion of a second metal layer located in the second region, wherein the second region is a portion to which the drain electrode corresponds, the second metal layer disposed on the first metal layer;
- a semiconductor layer, being overlapping on the source electrode, the drain electrode, and a gap between the source electrode and the drain electrode;
- a gate electrode, being over the semiconductor;
- an insulation layer, being overlapping on the data line and the semiconductor layer;
- a scanning line, being disposed on the insulation layer, the scanning line connecting with the gate electrode;
- a protection layer, being disposed on the scanning line and the insulation layer;
- an electrode layer, being formed by the first metal layer, the electrode layer connecting with the drain electrode;
- wherein the gate electrode is disposed on the insulation layer.
Dependencies are inferred from the claim text.