Magnetic core inductors for integrated voltage regulator
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorWen-Shiang Liao
Life of this patent
Estimating the term…
Abstract
A device includes an insulating layer disposed over a silicon substrate. The insulating layer includes a core insulating area and a peripheral insulating area. A trench laterally encloses the core insulating area and separates the core insulating area from the peripheral insulating area. A magnetic winding coil is disposed within the trench and separates the core insulating area from the peripheral insulating area. A conductive inner core is disposed within the core insulating area and is surrounded by the magnetic winding coil. The conductive inner core is made of a first material that is electrically conductive, and the magnetic winding coil is made of a second material that is magnetic and differs from the first material.
Claims20
A device, comprising:
- an insulating layer disposed over a silicon substrate, the insulating layer including a core insulating area and a peripheral insulating area, wherein a trench laterally encloses the core insulating area and separates the core insulating area from the peripheral insulating area;
- a magnetic winding coil disposed within the trench and separating the core insulating area from the peripheral insulating area;
- and
- a conductive inner core disposed within the core insulating area and surrounded by the magnetic winding coil, wherein the conductive inner core is made of a first material that is electrically conductive, and the magnetic winding coil is made of a second material that is magnetic and differs from the first material.
An integrated coupled-magnetic-core inductor, comprising:
- a package;
- a first layer formed on a carrier layer within the package;
- a magnetic winding coil formed within a trench area that is formed within the first layer;
- and
- conductive core vias formed within a core area that is formed within the first layer, the core area being inside the trench area.
An integrated voltage regulator system comprising:
- a control system in a package;
- and
- coupled-magnetic-core inductors in the package, wherein the control system is configured to utilize the coupled-magnetic-core inductors to generate a selected regulated voltage.
Dependencies are inferred from the claim text.