Horizontal substrate container with integral corner spring for substrate containment
AssigneeEntegris, Inc.
InventorEric A. KIRKLAND
Life of this patent
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AssigneeEntegris, Inc.
InventorEric A. KIRKLAND
Estimating the term…
A substrate container including substrate supports, such as concentric rings, adapted to receive substrates in a substrate stack. The container includes a base and a top cover to enclose the substrate stack. A latching mechanism is adapted to latch the top cover to the base and secure the substrate stack within the container. The latching mechanism includes resilient corner flanges on an outside portion of the container, the flanges acting as springs to exert a biasing force on the cover and on the substrate stack. The flanges hold the stack within the container while accommodating stack-up uncertainty caused by the accumulation of uncertainties due to component machining tolerances. In some embodiments, a gap is created between a side wall of the top cover and the base of the container to assure compression of the substrate stack. Deflection limiters may be implemented to prevent over-deflection of the flanges.
A container for substrates, the container defining a substrate storage area adapted to receive a plurality of stacked substrates, the container comprising:
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A substrate container, comprising:
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A container for substrates in combination with a substrate stack, the container comprising:
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A combination of a container for substrates and a plurality of substrates, the combination comprising:
Dependencies are inferred from the claim text.