Quartz crystal microbalance sensor for deposition monitoring

A quartz crystal microbalance (QCM) sensor, comprising:

• a crystal plate having a first surface and a second surface opposite the first surface;
• a buffer layer comprising a first buffer layer and a second buffer layer, wherein the first buffer layer is disposed on the first surface of the crystal plate, and the second buffer layer is disposed on the second surface of the crystal plate;
• and
• an electrode comprising a first electrode and a second electrode, wherein the first electrode is disposed on the first buffer layer, and the second electrode is disposed on the second buffer layer,
• wherein the electrode comprises a metal having a hexagonal close-packed lattice (HCP) crystal structure.

A quartz crystal microbalance (QCM) sensor, comprising:

• a crystal plate;
• a buffer layer disposed on the crystal plate;
• and
• an electrode disposed on the buffer layer,
• wherein the electrode comprises a metal having a hexagonal close-packed lattice (HCP) crystal structure, and
• wherein the buffer layer comprises a metal having a higher electrical activity than the metal included in the electrode.