Controlled pulse generation methods and apparatuses for evaluating stiction in microelectromechanical systems devices

A method for testing stiction in a Microelectromechanical systems (MEMS) device, the method comprising:

• loading a MEMS device into a socket provided on a movable Device-Under-Test (DUT) board, which is biased toward contact with a stop member positioned in a rotational path of the DUT board;
• rotating the DUT board to a predetermined angle, as taken about the rotational axis and measured from a start position in which the DUT board contacts the stop member;
• releasing the DUT board to allow the DUT board to rotate into contact with the stop member and generate a shock pulse transmitted through the MEMS device;
• and
• monitoring an output of the MEMS device to determine whether stiction of the MEMS device occurs pursuant to transmission of the shock pulse through the MEMS device.

A mechanized shock pulse test apparatus for testing stiction in a Microelectromechanical systems (MEMS) device, the mechanized shock pulse test apparatus comprising:

• a Device-Under-Test (DUT) board movable over predefined motion path having a start position and a stop position;
• an actuator coupled to the DUT board and controllable to move the DUT board over the predefined motion path;
• and
• a socket into which a MEMS device can be inserted, the socket located on the DUT board and positioned such that a controlled shock pulse is directed through the MEMS device when moved over the predefined motion path into the stop position.