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AssigneeTrafag AG
InventorsJan Dusing, Jurgen Koch, Oliver Suttmann, Marc Brotzmann, Armin Siber, Dieter Zeisel
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In order to produce accurate sensor element in a simple way, the invention provides a method for producing a sensor element (10) for a pressure or force sensor, comprising the steps: a) providing a component (13) to be deformed, c) applying to the component (13) a sensor function and contact layer (24) consisting of a material with a k-factor between 2 and 10, d) planar ablation of the material of the sensor function and contact layer (24) by means of a laser, in such a manner that strain gauges (44) with a resistance structure with a meandering shape and contact pads (46.1, 46.2, 46.3, 46.4) remain standing, wherein, for ablating the material, laser pulses from the group of laser pulses comprising: laser pulses in the sub-ps range, laser pulses from a broadband laser source (28) with a wavelength bandwidth of 10 nm to 70 nm laser pulses from a broadband laser source (28) with a fundamental wavelength and a wavelength bandwidth of at least 1%, preferably at least 2%, most preferably at least 3% of the fundamental wavelength, laser pulses compressed by a pulse compression process, and laser pulses conducted through a hollow-core fiber. are used.
A method for producing a sensor element (10) for a pressure or force sensor, comprising the steps:
The method according to any one of the preceding claims,
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A sensor element (10), which can be obtained by means of a method according to any one of the preceding claims.
Dependencies are inferred from the claim text.