Method for Detecting a Measurement Region in a Substrate

Abstract

A method for detecting a measurement region in a substrate, using an arrangement that includes a detector device having a detection field, a localization device, and a control device, is provided. The method includes selecting a measurement region to be detected, which has a start position and coordinates. The dimension of the measurement region to be detected is greater than the detection field of the detector device. The method also includes determining using the localization device an actual position of the detector device, and further determining by the control device an actual detection field from the actual position of the detector device. Moreover, the method includes comparing by the control device the start position of the measurement region to be detected with the actual detection field.

Dependencies are inferred from the claim text.