Optical interferometric system for measurement of a full-field thickness of a plate-like object in real time

An optical interferometric system for measurement of a full-field thickness of a plate-like object in real time, said optical interferometric system comprising:

• a first light source for radiating a first incident light in a first direction toward a reference point located on a surface of the plate-like object to produce a first interference fringe pattern (IFP);
• a second light source for radiating a second incident light in a second direction different from the first direction toward the reference point to produce a second IFP, the first incident light and the second incident light being coherent, having spherical wavefronts, and radiating the plate-like object with the spherical wavefronts;
• a first screen and a second screen for allowing the first and second IFPs to be imaged thereon, respectively;
• a first image capturing device and a second image capturing device that are disposed to face said first screen and second screen, respectively, and that are configured to respectively capture first and second light intensity distribution images respectively of the first and second IFPs imaged respectively on said first and second screens;
• and
• an image processing module that is electrically connected to said first image capturing device and said second image capturing device, and that is configured to
• convert the first and second light intensity distribution images into digital data,
• calculate a fringe order at the reference point according to digital data, and
• obtain a full-field distribution of the thickness of the plate-like object according to the fringe order.