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US 2017/0370554 A1Published application
Top-emission VCSEL-array with integrated diffuser
AssigneeApple Inc.
InventorsNeil MacKinnon, Weiping Li, Xiaofeng Fan
Life of this patent
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Abstract
A radiation source includes a semiconductor substrate, an array of vertical-cavity surface-emitting lasers (VCSELs) formed on the substrate, which are configured to emit optical radiation, and a transparent crystalline layer formed over the array of VCSELs. The transparent crystalline layer has an outer surface configured to diffuse the radiation emitted by the VCSELs.
Claims20
A radiation source, comprising:
- a semiconductor substrate;
- an array of vertical-cavity surface-emitting lasers (VCSELs) formed on the substrate, which are configured to emit optical radiation;
- and
- a crystalline layer formed over the array of VCSELs and having an outer surface configured to diffuse the radiation emitted by the VCSELs.
1 more element
A method of manufacturing a radiation source, the method comprising:
- forming an array of vertical-cavity surface-emitting lasers (VCSELs) on a semiconductor substrate;
- forming a crystalline layer over the VCSEL array;
- and
- etching an outer surface of the crystalline layer to create a surface structure that diffuses optical radiation emitted by the VCSELs.
1 more element
A radiation source, comprising:
- a semiconductor substrate;
- one or more vertical-cavity surface-emitting lasers (VCSELs) formed on the substrate, which are configured to emit optical radiation;
- a diffusing layer formed over each VCSEL, configured to diffuse the radiation emitted by the VCSEL;
- and
- anode electrodes of the VCSELs formed over the diffusing layer.
2 more elements
Dependencies are inferred from the claim text.