Pneumatic actuator and method for operating an active vibration isolation system
AssigneeIntegrated Dynamics Engineering GmbH
InventorsArndt EVERS, Frank HOFMANN, Han HARTGERS, Till SCHARF
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Abstract
A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.
Claims15
A pneumatic actuator for a stationary vibration isolation system, comprising a working space with a piston that divides the working space into a first pressure chamber and a second pressure chamber, wherein the piston is spaced apart from the inner surface of the working space by a gap, wherein the piston is movable only in an axial direction.
A method for operating an active vibration isolation system, comprising:
- pneumatic actuators which are effective in at least one direction are driven by a control device which is connected to a valve for controlling the pressure in a working space of the pneumatic actuator;
- wherein the force exerted by the pneumatic actuators or the pressure in pressure chambers of the pneumatic actuators is measured;
- and wherein the control device controls the pneumatic actuators taking into account the non-linear characteristic of the fluid in the pressure chambers.
Dependencies are inferred from the claim text.