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US 2017/0366762 A1Published application
Per-pixel performance improvement for combined visible and infrared image sensor arrays
AssigneeIntel Corporation
InventorsRichmond Hicks, Khaled Ahmed
Life of this patent
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Abstract
A per-pixel performance improvement is described for combined image sensor arrays that measure infrared and visible light. One embodiment is a method that includes forming an array of photodetectors on a silicon substrate, treating a subset of the photodetectors to improve sensitivity to infrared light, and finishing the photodetector array to form an image sensor.
Claims21
A method comprising:
- forming an array of photodetectors on a silicon substrate;
- treating a subset of th photodetectors to improve sensitivity of material of the photodetector to infrared light without improving sensitivity to visible light;
- and
- finishing the photodetector array to form an image sensor.
1 more element
10-20. (canceled)
A method comprising:
- forming an array of photodetectors on a silicon substrate;
- forming a mask over photodetectors that are not of a subset of the photodetectors;
- applying a chemical vapor deposition of chalcogens over the subset of the photodetectors that are not masked;
- applying a thermal anneal to the photodetectors that are not masked to improve sensitivity of the photodetector to infrared light;
- removing the mask;
- and
- finishing the photodetector array to form an image sensor.
4 more elements
A method comprising
- forming an array of photodetectors on a silicon substrate;
- adding impurities to material of only a subset of the photodetectors to improve sensitivity to infrared light without improving sensitivity to visible light;
- and
- finishing the photodetector array to form an image sensor.
1 more element
Dependencies are inferred from the claim text.