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US 2017/0366156 A1Published application
Acoustic wave filter device
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsWon HAN, Tae Hun LEE, Dae Hun JEONG, Moon Chul LEE, Sang Uk SON
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Abstract
An acoustic wave filter device includes a lower electrode disposed between a substrate and a piezoelectric layer, an upper electrode disposed on the piezoelectric layer, and an insulating layer disposed on the upper electrode. The insulating layer exposes portions of the upper electrode.
Claims20
An acoustic wave filter device comprising:
- a lower electrode disposed between a substrate and a piezoelectric layer;
- an upper electrode disposed on the piezoelectric layer;
- and
- an insulating layer disposed on the upper electrode,
- wherein the insulating layer exposes portions of the upper electrode.
2 more elements
An acoustic wave filter device, comprising:
- a lower electrode protecting layer disposed on a substrate defining a cavity therebetween;
- a lower electrode disposed between the lower electrode protecting layer and a piezoelectric layer;
- an upper electrode disposed on the piezoelectric layer;
- and
- an insulating layer disposed to cover portions of the upper electrode,
- wherein the insulating layer exposes a portion of the upper electrode.
3 more elements
An acoustic wave filter device, comprising:
- a lower electrode disposed between a substrate and a piezoelectric layer to form a cavity between the lower electrode and the substrate;
- an upper electrode disposed on the piezoelectric layer, the upper electrode comprising a first frame portion, a second frame portion, an extension portion and an end portion, wherein the extension portion extends between the first frame portion and the second frame portion, and the end portion extends from the second frame portion;
- and
- an insulating layer disposed on upper surfaces of the second frame portion, the extension portion, the end portion, and a partial upper surface of the first frame portion.
1 more element
Dependencies are inferred from the claim text.