Capacitive electromechanical transducer
AssigneeCanon Kabushiki Kaisha
InventorsAtsushi Kandori, Makoto Takagi, Masao Majima
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Abstract
The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element. The electromechanical transducer includes a plurality of elements including at least one cell that includes a first electrode and a second electrode opposed to the first electrode with a gap sandwiched therebetween and a direct-current voltage applying unit configured to be provided for each element and to separately apply a direct-current voltage to the first electrodes in each element. The first electrodes and the second electrodes are electrically separated for every element.
Claims20
An electromechanical transducer comprising:
- an element including a plurality of cells, the cell including a first electrode region and a second electrode region opposed to the first electrode region with a gap therebetween, and the element having a first electrode including a plurality of the first electrode regions and a second electrode including a plurality of the second electrode regions;
- and
- a substrate including a through wiring line, wherein
- one of the first electrode of the element and
- the second electrodes of the element is electrically connected to the through wiring line.
Dependencies are inferred from the claim text.