Monolithic two-dimensional vcsel array

A method of manufacturing a two-dimensional (2D) vertical-cavity surface emitting laser (VCSEL) array, the method comprising:

• providing a VCSEL array comprising:
• a plurality of VCSELs arranged in a two dimensional matrix, the plurality of VCSELs forming a monolithic VCSEL structure having a light-emitting surface and a rear surface opposite to the light-emitting surface;
• a front metal layer provided on the light-emitting surface;
• and
• a rear metal layer provided on the rear surface;
• wherein the plurality of VCSELs are arranged in a plurality of first lines of VCSELs in a first direction and a plurality of second lines of VCSELs in a second direction, the first direction being non-parallel to the second direction;
• patterning the front metal layer into a plurality of first metal contacts, each of the plurality of first metal contacts being electrically connected to each VCSEL of a corresponding first line of the plurality of first lines of VCSELs;
• forming, through the rear metal layer and into the monolithic VCSEL structure, a plurality of trenches to a predetermined depth so as to separate the other of the front metal layer and the rear metal layer into a plurality of second metal contacts, each of the plurality of second metal contacts being electrically connected to each VCSEL of a corresponding second line of the plurality of second lines of VCSELs;
• wherein the plurality of first metal contacts and the plurality of second metal contacts are arranged such that each combination of a first metal contact and a second metal contact is electrically connected to one VSCEL of the plurality of VCSELs.

A method of manufacturing a two-dimensional (2D) vertical-cavity surface emitting laser (VCSEL) array, the method comprising:

• providing a VCSEL array comprising:
• a plurality of VCSELs arranged in a two dimensional matrix, the plurality of VCSELs forming a monolithic VCSEL structure having a light-emitting surface and a rear surface opposite to the light-emitting surface;
• and
• a front metal layer provided on the light-emitting surface;
• wherein the plurality of VCSELs are arranged in a plurality of first lines of VCSELs in a first direction and a plurality of second lines of VCSELs in a second direction, the first direction being non-parallel to the second direction;
• patterning the front metal layer into a plurality of first metal contacts, each of the plurality of first metal contacts being electrically connected to each VCSEL of a corresponding first line of the plurality of first lines of VCSELs;
• forming a plurality of a plurality of second metal contacts on the rear surface, each of the plurality of second metal contacts being electrically connected to each VCSEL of a corresponding second line of the plurality of second lines of VCSELs;
• wherein the plurality of first metal contacts and the plurality of second metal contacts are arranged such that each combination of a first metal contact and a second metal contact is electrically connected to one VSCEL of the plurality of VCSELs.