Electromechanical actuator

2:

• The actuator according to claim 1, wherein the capacitive stack is located in the vicinity of the anchoring zone.

3:

• The actuator according to claim 1, wherein the capacitive stack is located for a portion in the anchored portion and for a portion in the mobile portion.

4:

• The actuator according to claim 1, wherein at least one portion of the capacitive stack is located in a zone of the deformable element that has a peak of concentration of bending stress.

5:

• The actuator according to claim 1, wherein the mobile portion comprises a beam or a membrane with a circular, rectangular or polygonal profile.

6:

• The actuator according to claim 5, wherein at least one portion of the measuring electrode has a profile parallel to the profile of the mobile portion.

7:

• The actuator according to claim 6, wherein at least one portion of the measuring electrode has an arched profile and at least one portion of the mobile portion has a circular profile;
• said profiles being preferably parallel.

8:

• The actuator according to claim 1, wherein the measuring device comprises a secondary capacitive stack that comprises a secondary measuring electrode arranged on the second face of the electro-active layer, a secondary measuring portion of the reference electrode located facing the secondary measuring electrode, and a portion of the electro-active layer inserted between the secondary measuring electrode and said secondary measuring portion of the reference electrode.

9:

• The actuator according to claim 8, wherein
• the mobile portion comprises a beam or a membrane with a circular, rectangular or polygonal profile, and
• at least one portion of the secondary measuring electrode has a profile parallel to the profile of the mobile portion.

10:

• actuator according to claim 9, wherein the mobile portion comprises a membrane having a circular profile, the profile of the portion of the secondary measuring electrode being arched and located at mid-radius of the circular profile.

11:

• The actuator according to claim 8, wherein at least one portion of the secondary capacitive stack is located in a zone of the deformable element that has a minimum of concentration of stress.

12:

• The actuator according to claim 8, wherein at least one portion of the secondary capacitive stack is located in a zone of the deformable element having a stress with a sign opposite that of a zone in which is located at least one portion of the capacitive stack.

13:

• The actuator according to claim 8, comprising a device for a differential treatment of variations in capacity values of the capacitive stack and of the secondary capacitive stack.

14:

• The actuator according to claim 1, comprising a voltage source (S) connected, by a first of its terminals, to the actuating electrode, a capacity meter (C) connected, by a first of its terminals, to the measuring electrode, second terminals of the voltage source and of the capacity meter being both connected to the reference electrode and to a reference potential.

15:

• The actuator according to claim 1, wherein the electro-active layer comprises at least one layer of a material chosen from:
• a piezoelectric material, an electro-strictive material, a para-electric material or a relaxor material.

16:

• The actuator according to claim 1, wherein the measuring electrode and the actuating electrode are etched portions of a same layer of material.

17:

• The actuator according to claim 1, formed by a microelectronic component.