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US 2017/0365723 A1Published application
Vacuum package, electronic device, and vehicle
AssigneeSeiko Epson Corporation
InventorHiromu KAWAI
Life of this patent
Estimating the term…
Abstract
A vacuum package includes a substrate, a pair of through electrodes that penetrates the substrate, each of the pair of the trough electrodes having first end portion, and a getter that is joined to the first end portions of the pair of the through electrodes, and is heated by electronic conduction via the pair of the through electrodes A portion of the getter between the through electrodes is spaced apart from the substrate.
Claims10
A vacuum package comprising:
- a substrate;
- a pair of through electrodes that penetrates the substrate, each of the pair of the trough electrodes having first end portion;
- and
- a getter that is joined to the first end portions of the pair of the through electrodes, and is heated by electronic conduction via the pair of the through electrodes;
- wherein a portion of the getter between the pair of the through electrodes is spaced apart from the substrate.
2 more elements
Dependencies are inferred from the claim text.