Semiconductor device, method for manufacturing semiconductor device, inverter circuit, driving device, vehicle, and elevator

A semiconductor device comprising:

• a silicon carbide layer having a first plane and a second plane;
• a first silicon carbide region of a first conductivity type provided in the silicon carbide layer;
• a second silicon carbide region of a second conductivity type provided between the first silicon carbide region and the first plane;
• a third silicon carbide region of the second conductivity type provided between the first silicon carbide region and the first plane;
• a fourth silicon carbide region of the first conductivity type provided between the second silicon carbide region and the first plane;
• a fifth silicon carbide region of the first conductivity type provided between the third silicon carbide region and the first plane;
• a gate electrode having a portion provided between the second silicon carbide region and the third silicon carbide region;
• a gate insulating layer having a portion provided between the second silicon carbide region and the gate electrode and a portion between the third silicon carbide region and the gate electrode;
• a sixth silicon carbide region of the second conductivity type provided between the first silicon carbide region and the second silicon carbide region, a part of the second silicon carbide region being interposed between the sixth silicon carbide region and the gate insulating layer, and the sixth silicon carbide region having a higher second-conductivity-type impurity concentration than the second silicon carbide region;
• and
• a seventh silicon carbide region of the second conductivity type provided between the first silicon carbide region and the third silicon carbide region, a part of the third silicon carbide region being interposed between the seventh silicon carbide region and the gate insulating layer, and the seventh silicon carbide region having a higher second-conductivity-type impurity concentration than the third silicon carbide region.