Die bonding apparatus and die bonding method
AssigneeFurukawa Electric Co., Ltd.
InventorsTeruyuki NAKAMURA, Akira SEKINO, Hidehiro TANIGUCHI
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AssigneeFurukawa Electric Co., Ltd.
InventorsTeruyuki NAKAMURA, Akira SEKINO, Hidehiro TANIGUCHI
Estimating the term…
A die bonding apparatus includes: a mounting base including a mounting area on which a first member is mounted; a heater arranged below the mounting base; a side wall configured to surround the mounting area; a collet configured to hold a second member by vacuum-chucking at an end portion; a lid including a hole, the lid being mounted on the side wall; a moving structure configured to move the collet to transport the second member held by the collet through the hole for bonding the second member to the first member; and a gas-supplying tube arranged on the side wall and configured to supply a heating gas to a heating space formed by the side wall and the lid. The lid contains a material capable of: reflecting an infrared radiation caused by the heater and the heating gas; or absorbing and re-radiating the infrared radiation.
A die bonding apparatus, comprising:
A die bonding method, comprising:
Dependencies are inferred from the claim text.