Integrated circuit device and method of fabricating the same
AssigneeSamsung Electronics Co., Ltd.
InventorsYONGKUK JEONG, Gl-GWAN PARK
Life of this patent
Estimating the term…
Abstract
An integrated circuit device includes: a first fin-type active region in a first area of a substrate, the first fin-type active region having a first recess filled with a first source/drain region; a first device isolation layer covering both lower sidewalls of the first fin-type active region; a second fin-type active region in a second area of the substrate, the second fin-type active region having a second recess filled with a second source/drain region; a second device isolation layer covering both lower sidewalls of the second fin-type active region; and a fin insulating spacer on the first device isolation layer, the fin insulating spacer covering a sidewall of the first fin-type active region under the first source/drain region.
Claims21
An integrated circuit device comprising:
- a substrate having a first area and a second area;
- a first fin-type active region in the first area, the first fin-type active region comprising a first fin portion having a first recess filled with a first source/drain region;
- a first device isolation layer covering both lower sidewalls of the first fin-type active region;
- a second fin-type active region in the second area, the second fin-type active region comprising a second fin portion having a second recess filled with a second source/drain region;
- a second device isolation layer covering both lower sidewalls of the second fin-type active region;
- and
- a fin insulating spacer covering at least one of a first sidewall of the first fin-type active region and a second sidewall of the second fin-type active region, the first sidewall of the first fin-type active region being between the first device isolation layer and the first recess, and the second sidewall of the second fin-type active region being between the second device isolation layer and the second recess.
An integrated circuit device comprising:
- a first fin-type active region in a first area of a substrate, the first fin-type active region protruding from the substrate and having a first channel region and a first recess;
- a first device isolation layer in the first area, the first device isolation layer covering both lower sidewalls of the first fin-type active region;
- a first gate line on the first device isolation layer, the first gate line covering the first channel region;
- a first source/drain region in the first recess;
- a second fin-type active region in a second area of the substrate, the second fin-type active region protruding from the substrate and having a second channel region and a second recess, the second area of the substrate being spaced apart from the first area of the substrate;
- a second device isolation layer in the second area, the second device isolation layer covering both lower sidewalls of the second fin-type active region;
- a second gate line on the second device isolation layer, the second gate line covering the second channel region;
- a second source/drain region in the second recess;
- and
- a fin insulating spacer only in the first area out of the first area and the second area, the fin insulating spacer covering both sidewalls of the first fin-type active region between the first device isolation layer and the first source/drain region.
18-42. (canceled)
An integrated circuit device comprising:
- a memory area, and a logic area connected to or spaced apart from the memory area;
- a first transistor comprising a first source/drain region filled in a first recessed portion of a first fin-type active region in the memory area;
- a first device isolation layer covering both lower sidewalls of the first fin-type active region in the memory area;
- a second transistor comprising a second source/drain region filled in a second recessed portion of a second fin-type active region in the logic area;
- a second device isolation layer covering both lower sidewalls of the second fin-type active region in the logic area;
- a first fin insulating spacer covering a first sidewall of the first fin-type active region between the first source/drain region and the first device isolation layer, the first fin insulating spacer having a first height;
- and
- a second fin insulating spacer covering a second sidewall of the second fin-type active region between the second source/drain region and the second device isolation layer, the second fin insulating spacer having a second height smaller than the first height, or no second fin insulating spacer covering the second sidewall of the second fin-type active region between the second source/drain region and the second device isolation layer.
Dependencies are inferred from the claim text.