Semiconductor device positioning system and method for semiconductor device positioning
AssigneeNexperia B.V.
InventorsThijs Kniknie, Jozef Petrus Wilhelmus Stokkermans
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Abstract
A positioning system and method for positioning a semiconductor device are disclosed. In an embodiment, a positioning system for positioning a semiconductor device includes a long-stroke stage configured to be movable with respect to a supporting structure within a plane and a short-stroke stage attached to the long-stroke stage and configured to carry a semiconductor device and to be rotatable within the plane. The long-stroke stage acts as a balance mass between the short-stroke stage and the supporting structure.
Claims20
A positioning system for positioning a semiconductor device, the positioning system comprising:
- a long-stroke stage configured to be linearly movable with respect to a supporting structure within a plane;
- and
- a short-stroke stage attached to the long-stroke stage and configured to carry a semiconductor device and to be linearly movable within the plane, wherein the long-stroke stage acts as a balance mass between the short-stroke stage and the supporting structure.
A positioning system for positioning a wafer, the positioning system comprising:
- a long-stroke stage configured to be linearly movable in a first direction and a second direction with a first range of motion relative to a supporting structure, wherein the first direction is perpendicular to the second direction;
- and
- a short-stroke stage attached to the long-stroke stage and configured to carry a wafer and to be linearly movable with a second range of motion relative to the long-stroke stage, wherein the second range of motion is smaller than the first range of motion, and wherein the long-stroke stage acts as a balance mass between the short-stroke stage and the supporting structure.
A method for positioning a semiconductor device, the method comprising:
- linearly moving a long-stroke stage with respect to a supporting structure within a plane;
- and
- linearly moving a short-stroke stage carrying a semiconductor device within the plane, wherein the short-stroke stage is supported by the long-stroke stage.
Dependencies are inferred from the claim text.