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US 2017/0365477 A1Published application
Providing a temporary protective layer on a graphene sheet
AssigneeNanomedical Diagnostics, Inc.
InventorsDENG PAN, BRETT GOLDSMITH
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Abstract
Embodiments of the disclosed technology include patterning a graphene sheet for biosensor and electronic applications using lithographic patterning techniques. More specifically, the present disclosure is directed towards the method of patterning a graphene sheet with a hard mask metal layer. The hard mask metal layer may include an inert metal, which may protect the graphene sheet from being contaminated or damaged during the patterning process.
Claims17
A method for providing a temporary layer on a graphene sheet comprising:
- transferring a graphene sheet to a selected wafer;
- depositing a metal layer to a first surface of the graphene sheet;
- and
- removing the metal layer.
1 more element
A method for providing a temporary layer on a graphene sheet comprising:
- transferring a graphene sheet to a selected wafer;
- depositing a metal layer on the graphene sheet;
- and
- removing the metal layer from the graphene sheet, wherein the metal layer comprises gold, ruthenium, rhodium, palladium, silver, osmium, iridium, or platinum.
1 more element
Dependencies are inferred from the claim text.