Laser doping apparatus and laser doping method
AssigneesKyushu University, Gigaphoton Inc.
InventorsTomoyuki OHKUBO, Hiroshi IKENOUE, Akihiro IKEDA, Tanemasa ASANO, Osamu WAKABAYASHI
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Abstract
The laser doping apparatus may irradiate a predetermined region of a semiconductor material with a pulse laser beam to perform doping. The laser doping apparatus may include: a solution supplying system configured to supply dopant-containing solution to the predetermined region, and a laser system including at least one laser device configured to output the pulse laser beam to be transmitted by the dopant-containing solution, and a time-domain pulse waveform changing apparatus configured to control a time-domain pulse waveform of the pulse laser beam.
Claims13
A laser doping apparatus that irradiates a predetermined region of a semiconductor material with a pulse laser beam to perform doping, comprising:
- a solution supplying system configured to supply dopant-containing solution to the predetermined region;
- and
- a laser system including
- at least one laser device configured to output the pulse laser beam to be transmitted by the dopant-containing solution, and
- a time-domain pulse waveform changing apparatus configured to control a time-domain pulse waveform of the pulse laser beam.
A laser doping apparatus that irradiates a predetermined region of a semiconductor material with a pulse laser beam to perform doping, comprising:
- a solution supplying system configured to supply boron-containing solution to the predetermined region;
- and
- at least one laser device configured to output the pulse laser beam to be transmitted by the boron-containing solution.
A laser doping method to irradiate a predetermined region of a semiconductor material with a pulse laser beam to perform doping, comprising:
- supplying dopant-containing solution to the predetermined region;
- outputting the pulse laser beam to be transmitted by the dopant-containing solution, and
- controlling a time-domain pulse waveform of the pulse laser beam.
Dependencies are inferred from the claim text.