Depositing a passivation layer on a graphene sheet
AssigneeNanomedical Diagnostics, Inc.
InventorsDENG PAN, BRETT GOLDSMITH, MITCHELL LERNER
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Abstract
Embodiments of the disclosed technology include depositing a passivation layer onto a surface of a wafer that may include a graphene layer. The passivation layer may protect and isolate the graphene layer from electrical and chemical conditions that may damage the graphene layer. As such, the passivation layer may further protect the graphene sensor from being damaged and impaired for its intended use. Additionally, the passivation layer may be patterned to expose select areas of the graphene layer below the passivation layer, thus creating graphene wells and exposing the graphene layer to the appropriate chemicals and solutions.
Claims18
A method for producing a graphene well comprising:
- placing a graphene sheet on a substrate;
- depositing a first metal layer on top of the graphene sheet;
- depositing a passivation layer on top of the first metal layer;
- and
- depositing a photoresist layer on top of the passivation layer.
A method for producing a graphene well comprising:
- placing a graphene sheet on a substrate;
- depositing a first metal layer on top of the graphene sheet;
- depositing a passivation layer on top of the first metal layer;
- depositing a photoresist layer on top of the passivation layer;
- and
- etching a pattern on the photoresist layer to expose a surface of the passivation layer.
Dependencies are inferred from the claim text.