Sputtering apparatus and method for forming semiconductor film using sputtering apparatus
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei YAMAZAKI
Life of this patent
Estimating the term…
Abstract
A novel sputtering apparatus capable of separating functions can be provided. A sputtering apparatus is capable of forming a semiconductor film and includes a first target, a first power source connected to the first target, a first shutter facing the first target, a first driver portion connected to the first shutter, a second target, a second power source connected to the second target, a second shutter facing the second target, and a second driver portion connected to the second shutter. The first driver portion and the second driver portion operate in conjunction with each other.
Claims12
A sputtering apparatus capable of forming a semiconductor film, the sputtering apparatus comprising:
- a first target;
- a first power source connected to the first target;
- a first shutter facing the first target;
- a first driver portion connected to the first shutter;
- a second target;
- a second power source connected to the second target;
- a second shutter facing the second target;
- and
- a second driver portion connected to the second shutter,
- wherein the first driver portion and the second driver portion are configured to be operated in conjunction with each other.
A sputtering apparatus capable of forming a semiconductor film, the sputtering apparatus comprising:
- a first target;
- a first power source connected to the first target;
- a first shutter facing the first target;
- a first driver portion connected to the first shutter;
- a second target;
- a second power source connected to the second target;
- a second shutter facing the second target;
- a second driver portion connected to the second shutter;
- a third target;
- a third power source connected to the third target;
- a third shutter facing the third target;
- and
- a third driver portion connected to the third shutter,
- wherein the first driver portion, the second driver portion, and the third driver portion are configured to be operated in conjunction with each other.
A method for forming a semiconductor film using a sputtering apparatus,
- the sputtering apparatus comprising:
- a first target;
- a first power source connected to the first target;
- a first shutter facing the first target;
- a first driver portion connected to the first shutter;
- a second target;
- a second power source connected to the second target;
- a second shutter facing the second target;
- and
- a second driver portion connected to the second shutter,
- the method comprising:
- a first step of turning on the first power source;
- a second step of turning on the second power source;
- a third step of operating the first driver portion to open the first shutter;
- and
- a fourth step of operating the second driver portion to open the second shutter,
- wherein a period during which the first step is performed and a period during which the second step is performed at least partly overlap with each other, and
- wherein the third step and the fourth step are performed in conjunction with each other.
A method for forming a semiconductor film using a sputtering apparatus,
- the sputtering apparatus comprising:
- a first target;
- a first power source connected to the first target;
- a first shutter facing the first target;
- a first driver portion connected to the first shutter;
- a second target;
- a second power source connected to the second target;
- a second shutter facing the second target;
- a second driver portion connected to the second shutter;
- a third target;
- a third power source connected to the third target;
- a third shutter facing the third target;
- and
- a third driver portion connected to the third shutter,
- the method comprising:
- a first step of turning on the first power source;
- a second step of turning on the second power source;
- a third step of turning on the third power source;
- a fourth step of operating the first driver portion to open the first shutter;
- a fifth step of operating the second driver portion to open the second shutter;
- and
- a sixth step of operating the third driver portion to open the third shutter;
- wherein a period during which the first step is performed, a period during which the second step is performed, and a period during which the third step is performed at least partly overlap with each other, and
- wherein the fourth step, the fifth step, and the sixth step are performed in conjunction with each other.
Dependencies are inferred from the claim text.