Hdd pattern implant system

An apparatus for processing magnetic substrates, comprising:

• a plurality of processing chambers, at least one of which has a substrate support with a plurality of laterally displaced substrate locations disposed therein;
• a transfer chamber coupled to the processing chambers;
• and
• a robot that rotates a substrate about an axis parallel to a diameter of the substrate.

A method of creating a pattern of magnetic domains on a magnetically susceptible surface of one or more substrates, comprising:

• applying a mask to at least a portion of the magnetically susceptible surface to form a masked portion and an unmasked portion of the surface;
• modifying the magnetic characteristics of the unmasked portion of the magnetically susceptible surface by immersing the substrate in a plasma comprising ions having an average energy between about 0.2 keV and about 4.8 key;
• and
• removing the mask.

A method of forming a magnetic medium for a hard disk drive, comprising:

• forming a magnetic layer on at least two major surfaces of a substrate;
• forming a patterned mask over the magnetic layer on the at least two major surfaces of the substrate to form a masked portion and an unmasked portion of the magnetic layer;
• and
• modifying the magnetic properties of the unmasked portion of the at least two major surfaces of the substrate by immersing the substrate in a plasma.