Apparatus and method of manufacturing radiation detection panel

An apparatus of manufacturing a radiation detection panel, comprising:

• an evaporation source configured to evaporate a scintillator material and emit the scintillator material vertically upward;
• a holding mechanism located vertically above the evaporation source, and holding a photoelectric conversion substrate such that a deposition surface of the photoelectric conversion substrate is exposed to the evaporation source and inclined with respect to a vertical axis;
• and
• a driving unit attached to the holding mechanism and configured to rotate the photoelectric conversion substrate with the holding mechanism,
• wherein
• the evaporation source includes an evaporation port through which the scintillator material is emitted;
• the holding mechanism holds the photoelectric conversion substrate such that 45°≦θ≦70° is satisfied at a center of the deposition surface, where θ is an angle made inside between an imaginary line connecting a center of the evaporation port and an arbitrary point on the deposition surface, and a normal line of the deposition surface;
• and
• the driving unit rotates the photoelectric conversion substrate with the holding mechanism by setting a rotation axis as an axis along a normal line of the center of the deposition surface.